The following is an example using the Graphical User Interface (GUI) built into the Silvaco software to generate the commands used to simulate a process (create a "Simulation Deck"). For this example I am doing a simple simulation (not the best) of a LOCOS process. The simulation deck could also be generated by typing commands directly in the upper DeckBuild window.

Note: The GUI doesn't do everything. The process simulators (Athena or SSUPREM4) have features that are not acessible from the GUI, but which can be used by directly typing in the upper window in DeckBuild.

To get started, first start up Manager. From within the Master file and application Manager double click on the DeckBuild icon to start the DeckBuild application.

Grid definition
Defining the silicon substrate
Pad Oxidation
Nitride Deposition
Nitride Etch
LOCOS Oxidation
Last Steps
Results

EE734|Electrical Engineering