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EE734 Example A simple simulation of a LOCOS process |
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Last Steps in Defining the Simulation Deck |
Next, I positioned the cursor at three appropriate points in the Deckbuild window and used Commands ® File I/O to enter commands to write output structure files just before the pad oxidation (initial), just after the nitride etch (Mask1) and at the end of the process (final). Each of the filenames should have an extension of ".str" to identify it as a "structure file." These will be used for looking at the final and intermediate results.
Lastly I directly typed comments at appropriate points in the simulation deck. Comment lines shoulds start with #.
To edit any of the commands you can either type directly in the upper window of DeckBuild or use the graphical user interface.